JPH0125403Y2 - - Google Patents
Info
- Publication number
- JPH0125403Y2 JPH0125403Y2 JP18387281U JP18387281U JPH0125403Y2 JP H0125403 Y2 JPH0125403 Y2 JP H0125403Y2 JP 18387281 U JP18387281 U JP 18387281U JP 18387281 U JP18387281 U JP 18387281U JP H0125403 Y2 JPH0125403 Y2 JP H0125403Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron
- emitting surface
- electron beam
- electron emitting
- metal column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 16
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 239000002184 metal Substances 0.000 claims description 13
- 238000010438 heat treatment Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000010406 cathode material Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18387281U JPS5887252U (ja) | 1981-12-10 | 1981-12-10 | 電子ビ−ム源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18387281U JPS5887252U (ja) | 1981-12-10 | 1981-12-10 | 電子ビ−ム源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5887252U JPS5887252U (ja) | 1983-06-13 |
| JPH0125403Y2 true JPH0125403Y2 (en]) | 1989-07-31 |
Family
ID=29983520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18387281U Granted JPS5887252U (ja) | 1981-12-10 | 1981-12-10 | 電子ビ−ム源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5887252U (en]) |
-
1981
- 1981-12-10 JP JP18387281U patent/JPS5887252U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5887252U (ja) | 1983-06-13 |
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